Capital Equipment

Capital Equipment

Electron Beam Lithographer

University of Cambridge

Electron Beam Lithography Is The Practice Of Emitting A Beam Of Electrons In A Patterned Fashion Across A Surface Covered With A Film.

The Cambridge Nanoscience Centre Offers Access To A High-Resolution Electron Beam Lithography System, The Cabl 9000C From Crestec Corporation Ltd Japan. Crestec Is The World Leader In High-Resolution E-Beam Lithography Tools. It Is The First System To Be Installed In The Uk. The Cabl 9000C Is A Highly Sophisticated Electron Beam Lithography System With A Beam Diameter Of 2Nm And Line Stitching Accuracy Of 20Nm.

No. Available: 1

Contact
Mrs Susan Murkett
Email: sm330@cam.ac.uk